Measurement Technology for Micro-Nanometer Devices

<i><b>A fully comprehensive examination of state-of-the-art technologies for measurement at the small scale</b></i><br /><br />• Highlights the advanced research work from industry and academia in micro-nano devices test technology<br />• Written at both introductory and advanced levels, provides the fundamentals and theories<br />• Focuses on the measurement techniques for characterizing MEMS/NEMS devices