CMOS – MEMS

This edition of ‘CMOS-MEMS’ was originally published in the successful series ‘Advanced Micro & Nanosystems’. Here, the combination of the globally established, billion dollar chip mass fabrication technology CMOS with the fascinating and commercially promising new world of<br> MEMS is covered from all angles.<br> <br> The book introduces readers to this fi eld and takes them from fabrication technologies and material charaterization aspects to the actual applications of CMOS-MEMS – a wide range of miniaturized physical, chemical and biological sensors and RF systems. Vital knowledge on circuit and system integration issues concludes this in-depth treatise, illustrating the advantages of combining CMOS and MEMS in the first<br> place, rather than having a hybrid solution.