Atomic Layer Processing

<p><b>Learn about fundamental and advanced topics in etching with this practical guide</b></p> <p><i>Atomic Layer Processing: Semiconductor Dry Etching Technology</i> delivers a hands-on, one-stop resource for understanding etching technologies and their applications. The distinguished scientist, executive, and author offers readers in-depth information on the various etching technologies used in the semiconductor industry, including thermal, isotropic atomic layer, radical, ion-assisted, and reactive ion etching.</p> <p>The book begins with a brief history of etching technology and the role it&nbsp;has played in the information technology revolution, along with a collection of commonly used terminology in the industry. It then moves on to discuss a variety of different etching techniques, before concluding with discussions of the fundamentals of etching reactor design and newly emerging topics in the field&nbsp;such as&nbsp;the role played by artificial intelligence in the technology.</p> <p><i>Atomic Layer Processing</i> includes a wide variety of other topics as well, all of which contribute to the author’s goal of providing the reader with an atomic-level understanding of dry etching technology sufficient to develop specific solutions for existing and emerging semiconductor technologies. Readers will benefit from:</p> <ul> <li>A complete discussion of the fundamentals of how to remove atoms from various surfaces</li> <li>An examination of emerging etching technologies, including laser and electron beam assisted etching</li> <li>A treatment of process control in etching technology and the role played by artificial intelligence</li> <li>Analyses of a wide variety of etching methods, including thermal or vapor etching, isotropic atomic layer etching, radical etching, directional atomic layer etching, and more</li> </ul> <p>Perfect for materials scientists, semiconductor physicists, and surface chemists, <i>Atomic Layer Processing</i> will also earn a place in the libraries of engineering scientists in industry and academia, as well as anyone involved with the manufacture of semiconductor technology. The author’s close involvement with corporate research &amp; development and academic research allows the book to offer a uniquely multifaceted approach to the subject.</p>