High-k Gate Dielectrics for CMOS Technology

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ISBN: 9783527330324 Category:

A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological<br> viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these<br> materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies.<br> <br> Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections<br> with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.