Mechanics of Microsystems

<p><b>Mechanics of Microsystems</b></p> <p>Alberto Corigliano, Raffaele Ardito, Claudia Comi, Attilio Frangi, Aldo Ghisi and Stefano Mariani, Politecnico di Milano, Italy</p> <p> </p> <p><b><i>A mechanical approach to microsystems, covering fundamental concepts including MEMS design, modelling and reliability</i></b></p> <p> </p> <p><i>Mechanics of Microsystems</i> takes a mechanical approach to microsystems and covers fundamental concepts including MEMS design, modelling and reliability. The book examines the mechanical behaviour of microsystems from a ‘design for reliability’ point of view and includes examples of applications in industry.</p> <p><i>Mechanics of Microsystems</i> is divided into two main parts. The first part recalls basic knowledge related to the microsystems behaviour and offers an overview on microsystems and fundamental design and modelling tools from a mechanical point of view, together with many practical examples of real microsystems. The second part covers the mechanical characterization of materials at the micro-scale and considers the most important reliability issues (fracture, fatigue, stiction, damping phenomena, etc) which are fundamental to fabricate a real working device.</p> <p> </p> <p> </p> <p>Key features:</p> <ul> <li>Provides an overview of MEMS, with special focus on mechanical-based Microsystems and reliability issues.</li> <li>Includes examples of applications in industry.</li> <li>Accompanied by a website hosting supplementary material.</li> </ul> <p> </p> <p> </p> <p>The book provides essential reading for researchers and practitioners working with MEMS, as well as graduate students in mechanical, materials and electrical engineering.</p>