Understanding MEMS

<p>The continued advancement of MEMS (micro-electro-mechanical systems) complexity, performance, commercial exploitation and market size requires an ever-expanding graduate population with state-of-the-art expertise.</p> <p><i>Understanding MEMS: Principles and Applications </i>provides a comprehensive introduction to this complex and multidisciplinary technology that is accessible to senior undergraduate and graduate students from a range of engineering and physical sciences backgrounds.</p> <p>Fully self-contained, this textbook is designed to help students grasp the key principles and operation of MEMS devices and to inspire advanced study or a career in this field.</p> <p>Moreover, with the increasing application areas, product categories and functionality of MEMS, industry professionals will also benefit from this consolidated overview, source of relevant equations and extensive solutions to problems.</p> <p>Key features:</p> <ul> <li>Details the fundamentals of MEMS, enabling readers to understand the basic governing equations and know how they apply at the micron scale.</li> <li>Strong pedagogical emphasis enabling students to understand the fundamentals of MEMS devices.</li> <li>Self-contained study aid featuring problems and solutions.</li> <li>Book companion website hosts Matlab and PSpice codes and viewgraphs.</li> </ul>