Wafer Manufacturing


Shaping of Single Crystal Silicon Wafers

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ISBN: 9780470061213 Category:

<p>Presenting all the major stages in wafer manufacturing, from crystals to prime wafers.</p> <p>This book first outlines the physics, associated metrology, process modelling and quality requirements and the goes on to discuss wafer forming and wafer surface preparation techniques.  The whole is rounded off with a chapter on the research and future challenges in wafer manufacturing.</p>